Presentation Information

[Tu-3A-02]Geometrical Engineering of Trench Corners via High Temperature Annealing: Mitigating Field Crowding and Enhancing Dielectric Reliability in 8 Inch SiC Trench MOSFETS

*Minghua Zhu1, Cen Tang1, Da Wang1, Tianlin Yang1, Ziting Tan1, Zijing Huang1, Bin Hu1, Yuting Tang1, Wentao Yang1, Jin Rao1 (1. Huawei Technologies Co., Ltd., Shenzhen, China (China))