Presentation Information

2:50 PM - 3:10 PM JST(5:50 AM - 6:10 AM UTC)

[Tu-3A-03]XPS Evaluation of Etch Damage and Nitrogen Incorporation in 4H-SiC Trenches

*Runze Wang¹, Mingsheng Zhang², Hwee Leng Seng², Rong Ji², Jisheng Pan², Zijie Zheng^1,3, Yu-Chieh Chien¹, Xiaolin Wang^1,3, Leming Jiao^1,3, Liyuan Liu¹, Abdul Hannan Yeo¹, Qin Gui Voo¹, Umesh Chand¹, Xiao Gong^1,3, Navab Singh¹, Yee Chia Yeo^1,3 (1. Inst. of Microelectronics (IME), A*STAR (Singapore), 2. Inst. of Materials Res. and Eng. (IMRE), A*STAR (Singapore), 3. National Univ. of Singapore (Singapore))

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