Presentation Information
[Tu-3B-05]Demonstration of 500°C non-volatile Memory of AlScN Ferroelectric Capacitors Controlled by SiC Lateral MOSFET
*Emad Andarawis1, Collin Hitchcock1, Lucy Broderick1, Robert Gossman1, Tammy Johnson1, Shubhodeep Goswami1, Mehrnegar Aghayan1, Brendan Hanrahan2, Daniel Drury2, Nastazia Moshirfatemi2 (1. GE Aerospace Res. (USA), 2. Army Res. Lab. (USA))
