Presentation Information
[Tu-P-04]Evaluation of Defect Generation in P-type 4H-SiC PVT Growth under Al–N Co-Doping Conditions
*Kazuma Eto1, Shigeyuki Kuboya1, Takeshi Mitani1, Tomohisa Kato1 (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan))