Presentation Information

[Tu-P-16]Influence of Technological Surface Structures for Super Junction Devices on 4H SiC Epitaxial Overgrowth

*Nikolas Schabert1, Janina Engelhardt1, Rupert Ullmann2, Philip Hens2, Birgit Kallinger1, Oleg Rusch1 (1. Inst. Fraunhofer IISB (Germany), 2. Indus. AIXTRON SE (Germany))