Presentation Information

[Tu-P-17]Influence of Ion Implantation and Epitaxial Overgrowth on the Charge Carrier Lifetime in 4H-SiC Epilayer Stacks

*Christian Wißgott1, Birgit Kallinger1, Mauro Emilio Keck1, Norman Böttcher1 (1. Fraunhofer IISB (Germany))