[Tu-P] Poster Session

[Tu-P-19] 3C-SiC formation by solid state reaction of Si and C multilayers deposited on silicon substrates

Dwarakesh Sudhahar^1,2, Joachim Döll³, Marc Pezoldt⁴, Deepshikha Shekhawat¹, *Joerg Pezoldt¹ (1. TU Ilmenau (Germany), 2. Ruhr-Universität Bochum (Germany), 3. Zentrum für Mikro- und Nanotechnologien (Germany), 4. KI Keramik-Institut GmbH (Germany))