Presentation Information
[Tu-P-21]Multiphoton-excited photoluminescence analysis of micropipes and related defect structures in 4H-SiC substrates
*Hirofumi Hoshida1, Shota Fujiki1, Mari Yamamoto1, Takeshi Mitani2, Junji Senzaki2 (1. Lasertec Corp. (Japan), 2. National Inst. of Advanced Indus. Sci. and Tech. (Japan))