Presentation Information
[Tu-P-25]Conversion of Substrate Dislocations to Stacking Faults
and Influence of Aluminum Implantation on Stacking Faults
*Nadja Kölbel1, Birgit Kallinger2, Christian Kallinger Kranert2, Tobias Erlbacher3, Firas Faisal3, Jörg Schulze1,2 (1. Friedrich-Alexander-Universität Erlangen-Nürnberg (Germany), 2. Fraunhofer IISB (Germany), 3. Nexperia (Germany))