[Tu-P] Poster Session

[Tu-P-34] Detailed μ-PCD Decay Curve Characterization for Defect-Related Recombination in 4H-SiC Epitaxial Layers

*Takumi Wakabayashi¹, Kazushi Hayashi², Hideo Fujii², Yoshihiro Yokota¹, Naoki Okano¹, Junji Senzaki³ (1. Kobelco Research Institute, Inc. (Japan), 2. Kobe Steel, Ltd. (Japan), 3. National Institute of Advanced Industrial Science and Technology (AIST) (Japan))