[Tu-P] Implantation, Contacts, Etching, and Other Processes

[Tu-P-45] High-Stability Low-on-resistance 4H-SiC Power Devices by Warpage Control and Roughness-Engineered Backside Contacts

Songlin Yang¹, Yehui Luo¹, Yao Yao¹, Yinhua Cheng¹, *Eric Deng² (1. Zhuzhou CRRC Times Semiconductor Co Ltd, (China)
2. Jiangxi Hengzuan New Materials Technology Co.,Ltd, Pingxiang, (China))