Presentation Information
[Tu-P-67]Enhancing Performance of 4H-SiC CMOS Integrated Circuits via Atomic Layer Deposition Gate oxide
*Po-Han Wang1, I-Chen Tsai1, Cheng-Shu Chang1, Yun-Ting Huang1, Nai-Quan Sun1, Bing-Yue Tsui1 (1. National Yang Ming Chiao Tung University (Taiwan))