Presentation Information
[Tu-P-68]Effects of Wet and Nitric Oxide Post-Deposition Annealing on the Interface Quality and Long-term Reliability of LPCVD SiO2 on 4H-SiC
*I-Chen Tsai1, Bing-Yue Tsui1, Shih-Lung Tsai2, Kuan-Wei Chu2, Tien-Min Yuan2 (1. National Yang Ming Chiao Tung Univ. (Taiwan), 2. Mosel Vitelic Inc. (Taiwan))