Presentation Information
[Tu-P-86LN]Carrier Lifetime Enhancement by Channeled Ion Implantation in 4H-SiC
*Ben J. Sekely1, Christopher Lamontagne2, Youngsang Kim3, Alecsander N Imhoff1, Nadeemullah Mahadek1, Jenifer R Hajzus1, Rachael L Myers-Ward1, Atul Gupta2, Hank Chen2, Fulvio Mazzamuto2 (1. U.S. Naval Research Laboratory (USA), 2. Axcelis Technologies (USA), 3. Defense Microelectronics Activity (USA))