[We-2B] Stacking Fault Expansion

11:30 AM - 11:50 AM JST(2:30 AM - 2:50 AM UTC)

[We-2B-03] Atomic and Electronic View of Stacking Fault Expansion and Its Suppression Recipes in 4H-SiC

*Kenji Shiraishi^2,6, Masaki Sano¹, Yuansheng Zhao^2,3,4, Takashi Yoda⁵, Takayuki Oba⁵, Jun Kojima², Shoichi Onda², Atsushi Oshiyama^2,6 (1. Graduate School of Engineering, Nagoya University (Japan), 2. Institute of Materials and Systems for Sustainability, Nagoya University (Japan), 3. Quemix Inc. (Japan), 4. Department of Physics, The University of Tokyo (Japan), 5. WOW Alliance, Institute of Science Tokyo (Japan), 6. Center for Innovative Integrated Electronic Systems, Tohoku University (Japan))