Presentation Information

[We-2B-04]Characterization of Triangular Defect Stacking Faults in 180 um Thick SiC Epitaxial Layers

*Alecsander Imhof1, Nadeemullah Mahadik2, Shanthi Subramanian3, Srujana Prayakarao3, Dong Lee3 (1. NRC Post Doc at U.S. Naval Res. Lab. (USA), 2. U.S. Naval Res. Lab. (USA), 3. Coherent Corp. (USA))