Presentation Information
[We-P-98LN]Ion-Species Effects on Implantation-Induced Lattice Damage for Bipolar Degradation Suppression in 4H-SiC PiN Diodes
Atsushi Shimbori1, *Ryota Wada2, Nobuhiro Tokoro2, Takashi Kuroi2, Chiho Sung3, Hiu Yung Wong4, Alex Q. Huang1 (1. Univ. of Texas at Austin (USA), 2. Nissin Ion Equipment Co., Ltd. (Japan), 3. Unv. of Michigan (USA), 4. San Jose State Univ. (USA))