Presentation Information
[We-P-07]Multi-Epitaxy with Channeling Implantation and Deep Trench Design for 3.3 kV Semi-Superjunction MOSFET
*Kyrylo Melnyk1, Arne Benjamin Renz1, Mustafa Akif Yildirim1, Vishal Ajit Shah1, Peter Michael Gammon1, Marina Antoniou1 (1. University of Warwick (UK))
