[We-P] Poster Session

[We-P-36] High Sensitivity Temperature Sensors with SiC MOS Capacitors Fabricated Using Grown Polyoxides

*Razvan Pascu¹, Gheorghe Pristavu², Gheorghe Brezeanu², Mihaela Kusko¹ (1. National Institute for Research and Development in Microtechnologies -IMT Bucharest (Romania), 2. National University of Science and Technology Politehnica Bucharest (Romania))