Presentation Information
[We-P-42]Effect of Sputter Gas O2 Ratio on the Electrical Characteristics of (In0.1Ga0.9)2O3/4H-SiC Heterojunction Diodes
*Sabeen Hwang1, Chang-Jun Park1, Hyeon-Do Kang1, Minseok Kim1, Tae-yeong Yoon1, Chowdam Venkata Prasad1, Sang-Mo Koo1 (1. Kwangwoon Univ. (Korea))