Presentation Information
[We-P-43]Plasma power-dependent O2-plasma recovery of dry-etch-induced damage in β-Ga2O3 Schottky barrier diodes
*Ye-Jin Kim1, Minseok Kim1, Hyeon-Do Kang1, Jin-Woo Choi1, Sabeen Hwang1, Chowdam Venkata Prasad1, Sang-Mo Koo1 (1. Kwangwoon Univ. (Korea))