Presentation Information
[We-P-44]Enhanced Anodic Oxidation Behavior in 4H-SiC by Pulsed Voltage Control with Negative Base Bias
*Shoki Ohara1, Ryuya Matsumoto1, Aoto Hashiguchi1, Kyoya Okawa1, Motoaki Iwaya1, Tetsuya Takeuchi1, Atsushi Suzuki2, Eri Akazawa2, Yiyu Ou3, Haiyan Ou3, Satoshi Kamiyama1 (1. Meijo Univ. (Japan), 2. E&E Evolution Ltd. (Japan), 3. Technical Univ. of Denmark (Denmark))