[We-P] Poster Session

[We-P-53] A High-Throughput Technique for Color Center Quantification with Neural Networks and its Practical Application in a Surface Passivation Study

*Christian Gobert¹, Glenn Held¹, Oskar Reichenberger¹, Sarah Saarmann¹, Marina Scharin-Mehlmann¹, Patrick Berwian¹, Peter Evanschitzky¹, Michael Krieger², Jochen Friedrich¹, Jörg Schulze^1,3 (1. Fraunhofer Inst. for Integrated Systems and Device Tech. IISB (Germany), 2. Chair of Applied Physics, Univ. Erlangen-Nuremberg (FAU) (Germany), 3. Chair of Electron Devices, Univ. Erlangen-Nuremberg (FAU) (Germany))