Presentation Information
[We-P-62]Novel approaches for volumetric information in 4H-SiC wafers and boules at an industrial scale in a production environment.
*Jimmy Thörnberg1, Torben L. Purz2, Anton Vakulenko2, Eric W. Martin2, Björn Magnusson1 (1. STMicroelectronics Silicone Carbide AB (Sweden), 2. MONSTR Sense Technologies (USA))