Presentation Information
[We-P-73]Multi-channel defect inspection of 4H-SiC epitaxial wafers by using a single convolutional neural network trained on composite images from different inspection techniques
*Masaki Hasegawa1, Koichi Endo1, Junji Senzaki1 (1. Nat. Inst. of Adv. Indus. Sci. and Tech. (Japan))