Presentation Information
[We-P-75]Demonstration of Synchrotron X-ray Topography over an Entire 200-mm 4H-SiC Wafer
*Shunta Harada1, Juheyong Sun1, Kota Tsujimori1, Kentaro Kajiwara2, Takayoshi Shimura3 (1. Nagoya Univ. (Japan), 2. JASRI (Japan), 3. Waseda Univ. (Japan))
