[We-P] Poster Session

[We-P-76] Whole-Wafer Imaging of 6-inch 4H-SiC Wafers using Synchrotron X-ray Topography and Automated Defect Classification

*Yuhui Huang¹, Rui Zhou¹, Weiyuan Xia¹, Kentaro Kajiwara², Takashi Kameshima^2,3, Taito Osaka³, Makina Yabashi³, Takayoshi Shimura^1,3 (1. Waseda Univ. (Japan), 2. Japan Synchrotron Radiation Research Inst. (Japan), 3. RIKEN SPring-8 Center (Japan))