Presentation Information
[We-P-78]Algorithm for automated multimodal characterization of dislocations in 4H-SiC wafers using X-ray topography and polarized light microscopy
*Kosei Takahashi1, Kota Tsujimori2, Michio Kawase1, Keisuke Seo1, Seiya Mizutani3, Yuya Mizutani3, Seiji Mizutani3, Kenta Shimamoto4, Kenta Murayama3, Shunta Harada1,2 (1. Nagoya Univ. (Japan), 2. SSR Corp. (Japan), 3. Mipox Corp. (Japan), 4. Rigaku Corp. (Japan))