[AMD4] Oxide TFT (3)

1:30 PM - 1:50 PM JST(4:30 AM - 4:50 AM UTC)Invited

[AMD4-1(Invited)] The Value of ALD Oxide Semiconductor Thin Film Transistor Beyond Mobility-Reliability Trade-Off

Yoon-Seo Kim¹, *Jin-Seong Park¹ (1. Hanyang University (Korea))

Keywords:

Atomic Layer Deposition,Oxide Semiconductor,Thin Film Transistor

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