Presentation Information
[MEETp1-8]Enhanced Electrical Performance of Dual-Gate InGaO TFT by Ar/O2 Plasma Exposure
*Yuna Kim1, Jiwon Sun1, Seungchae Jung1, Jin Jang1 (1. Kyung Hee University (Korea))
Keywords:
Indium gallium oxide(IGO),Thin-film transistor(TFT),Ar/O2 plasma treatment
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