Presentation Information

[MEETp1-8]Enhanced Electrical Performance of Dual-Gate InGaO TFT by Ar/O2 Plasma Exposure

*Yuna Kim1, Jiwon Sun1, Seungchae Jung1, Jin Jang1 (1. Kyung Hee University (Korea))

Keywords:

Indium gallium oxide(IGO),Thin-film transistor(TFT),Ar/O2 plasma treatment