Presentation Information
[1(Invited)]High-Performance Single-Crystal In2O3 FET Toward 3D VLSI Circuits(20min.)
*Satoru Saito1, Tatsuya Onuki1, Shoki Miyata1, Kazuma Furutani1, Yuji Egi1, Yoshinori Ando1, Motomu Kurata1, Takanori Matsuzaki1, Satoshi Seo1, Shunpei Yamazaki (1. Semiconductor Energy Laboratory Co. Ltd. (Japan))
Keywords:
Crystal IO,Single crystal,CAAC-IGZO,seed,VFET
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