[AMD5] Oxide TFT (3)

9:00 AM - 9:20 AM JST(12:00 AM - 12:20 AM UTC)

[AMD5-1(Invited)] High-Performance Single-Crystal In₂O₃ FET Toward 3D VLSI Circuits

*Satoru Saito¹, Tatsuya Onuki¹, Shoki Miyata¹, Kazuma Furutani¹, Yuji Egi¹, Yoshinori Ando¹, Motomu Kurata¹, Takanori Matsuzaki¹, Satoshi Seo¹, Shunpei Yamazaki¹ (1. Semiconductor Energy Laboratory Co. Ltd. (Japan))

Keywords:

Crystal IO,single crystal,CAAC-IGZO,seed,VFET

Password required to view

To view or download the proceedings, please log into your A-Pass using the "Log in" button.

If you do not have a A-Pass, enter the password provided by the IDW Secretariat in the designated box and click the "Authenticate" button.

Log in

or