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Hydrogen-Resistant IGZO TFT with Nitrogen-Engineered SiO<sub>2</sub> Gate Insulator via PEALD

Oxide TFT (3)

The 32nd International Display Workshops (IDW '25)

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[AMD5-04]Hydrogen-Resistant IGZO TFT with Nitrogen-Engineered SiO₂ Gate Insulator via PEALD

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[AMD5-04]Hydrogen-Resistant IGZO TFT with Nitrogen-Engineered SiO2 Gate Insulator via PEALD

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[AMD5-04]Hydrogen-Resistant IGZO TFT with Nitrogen-Engineered SiO₂ Gate Insulator via PEALD