Presentation Information
[AMDp1-5]Hydrogen-Doped In2O3 Thin-Film Transistors with Enhanced Performance Fabricated by RF Sputtering
*Ye-Jin Shim1, Jong-Hyun Jang1, Hyeon Seok Lee1, Min-Seo Kim1, Ju-Yong Kim1 (1. Sungkyunkwan University (Korea))
Keywords:
Hydrogen doping,Indium oxide,Thin-film transistors,Oxygen vacancies,RF magnetron sputtering
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