Presentation Information
[AMDp1-20]Stability Improvement of IGZO TFTs Using Hydroxyl Radical Generated by UV Treatment of 2-ME Solvent
*In-Yeong So1, Gi Yoong Chung1, Kook Chul Moon1, Yong-Sang Kim1 (1. Sungkyunkwan University (Korea))
Keywords:
Hydroxyl radical,UV/O3,2-methoxyethanol,IGZO TFTs
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