Presentation Information

[21]Stability Improvement of IGZO TFTs Using Hydroxy Radical Generated by UV Treatment of 2-ME Solvent

*In-Yeong So1, Gi Yoong Chung1, Kook Chul Moon1, Yong-Sang Kim1 (1. Sungkyunkwan University (Korea))

Keywords:

Hydroxyl radical,UV/O3,2-methoxyethanol,IGZO TFTs


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