Presentation Information
[AMDp1-25L]Investigation of Atmosphere- and Temperature-Dependent Trends in IGZO TFTs via Two-Step RTA/Furnace Annealing
*Seyepng Yoo1,2, Byoung-Deog Choi1 (1. Sungkyunkwan University (Korea), 2. Samsung Institution of Technology (Korea))
Keywords:
IGZO,Oxide Semiconductor,TFT,Anneal
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