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Investigation of Atmosphere- and Temperature-Dependent Trends in IGZO TFTs via Two-Step RTA/Furnace Annealing

Active-Matrix Device

The 32nd International Display Workshops (IDW '25)

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[AMDp1-25L]Investigation of Atmosphere- and Temperature-Dependent Trends in IGZO TFTs via Two-Step RTA/Furnace Annealing

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