[FLX7] Advanced Processes and Materials for Flexible Devices (2)

[1(Invited)] Realization of All Roll-to-Roll-Processed IGZO-TFTs with Siloxane/SiO₂ Hybrid Structures(20min.)

*Ai Hanawa¹, Tsukasa Kishiume¹, Masayoshi Fuchi¹, Makoto Nakazumi¹, Juan Paolo S. Bermundo², Yukiharu Uraoka² (1. Nikon Corporation (Japan), 2. Nara Institute of Science and Technology (Japan))

Keywords:

solution-processed insulator,oxide semiconductor,Roll-to-Roll,Flexible,TFT