[FMC4] Manufacturing and Processes

9:00 AM - 9:20 AM JST(12:00 AM - 12:20 AM UTC)

[FMC4-1] Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al₂O₃ Barrier Films in OLED Encapsulation

*Ji Yeon Park¹, Ju Won Kim¹, Seong-A Shin¹, Chi-Hoon Lee¹, Jin-Seong Park¹ (1. Hanyang University (Korea))

Keywords:

Atmospheric spatial atomic layer deposition,Al2O3,Thin film encapsulation

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