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(20min.)

Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al2O3 Barrier Films in OLED Encapsulation

Manufacturing and Processes

The 32nd International Display Workshops (IDW '25)

Presentation Information

[1]Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al₂O₃ Barrier Films in OLED Encapsulation(20min.)

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Presentation Information

[1]Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al2O3 Barrier Films in OLED Encapsulation(20min.)

Keywords:

Comment

[1]Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al₂O₃ Barrier Films in OLED Encapsulation(20min.)