Presentation Information
[FMCp1-9]Scalar Diffraction Study in Proximity Printing
*Minchul Sakong1, Jaewon Huh1, Musun Kwak1, Yuho Jung1, Sungjin Oh1, Youngseok Choi1 (1. LG Display Co., Ltd. (Korea))
Keywords:
Diffraction,Proximity Printing,Exposure Gap,Mask Critical Design,Photo Resist Thickness
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