Presentation Information
[11]Tunable Mechanical and Optical Properties of Al-doped SiC-ON Thin Films Using Reactive Co-Sputtering at Room Temperature
*HyeonSeok Lee1, Jong-Hyun Jang1, Ju-Yong Kim1, Ye-Jin Shim1, Min-Seo Kim1, Han-Ki Kim1 (1. Sungkyunkwan University (Korea))
Keywords:
Co-Sputtering,Al-doped SiC-ON,Room-temperature,High Hardness,High Refractive index
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