Presentation Information
[FMCp1-27L]A Comparative Investigation of Continuous-Wave and Pulsed Plasma for Anisotropic Etching of TiO2 for Metalenses
*Akihide Sato1, Jongwoo Hong1, Geunyoung Yeom1 (1. Sungkyunkwan University (Korea))
Keywords:
Metalens,Pulsed plasma,Synchronous pulsing,Asynchronous pulsing,Aspect ratio dependent etching
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