Presentation Information
[FMCp1-31L]Etching of Dielectric Contact Hole of Thin Film Transistor with Low-GWP Gas
*Junsoo Lee1, Junwon Jeong1, Jongwoo Hong1, Geunyoung Yeom1 (1. Sungkyunkwan University (Korea))
Keywords:
CF4,C2F4O,C2HF3O,GWP,Plasma etching
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