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Improvement of Electrical Properties of SiO<sub>2</sub> Gate Insulator by Nitric Oxide Plasma Treatment

Manufacturing, Materials and Components

The 32nd International Display Workshops (IDW '25)

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[FMCp1-35L]Improvement of Electrical Properties of SiO₂ Gate Insulator by Nitric Oxide Plasma Treatment

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[FMCp1-35L]Improvement of Electrical Properties of SiO2 Gate Insulator by Nitric Oxide Plasma Treatment

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[FMCp1-35L]Improvement of Electrical Properties of SiO₂ Gate Insulator by Nitric Oxide Plasma Treatment