[MEET1] Novel Materials, Fundamental Components and Process Technologies

2:10 PM - 2:30 PM JST(5:10 AM - 5:30 AM UTC)

[MEET1-3(Invited)] Enhanced Extreme Ultraviolet (EUV) Light Source Using Cold Electron Beam (C-beam) Irradiation for High-Precision EUV Pellicle Inspection

Umesh Apugade¹, Iksu Kim¹, *Kyu Chang Park¹ (1. Kyung Hee University (Korea))

Keywords:

extreme vltraviolet,cold electron beam,lighting,pellicle

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