[MEET1] Novel Materials, Fundamental Components and Process Technologies

2:30 PM - 2:50 PM JST(5:30 AM - 5:50 AM UTC)

[MEET1-4] Polymer Removal and Scallops Smoothing Optimized Chemistry in MEMS Process Fabrication and Other Applications within a High-Density Radical Flux Remote Plasma

Yumi Kawamura², *Marc Segers¹, Michio Tanimura², Saphia Benkoula¹, Hirokuni Shibata², Thierry Lazerand¹ (1. Plasma-Therm Europe (France), 2. Plasma-Therm-Japan K.K. (Japan))

Keywords:

remote plasma,Polymer removal,smoothing,MEMS,High Density Radical Flux

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