Presentation Information
[2(Invited)]Efficient High-Mobility Oxide Thin Film Transistor Process Optimization by AI(20min.)
*Yujiro Takeda1、Wei-Chun Ma1、Elliot Lu1、Yu-Hsuan Hsu1、Dejiu Fan2、Jung Bae Kim2、Lynn Yang1、Ping Han Hsieh1、Gejian Zhao2、You-Ron Lin1、Juergen Grillmayer1、Zero Hung2、Soo Young Choi2 (1. Applied Materials, Taiwan (Taiwan), 2. Applied Materials, Inc. (USA))
Keywords:
TFTs,AI,dynamic PVD system,high mobility,multilayer,Machine Learning
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