Presentation Information
[2(Invited)]Efficient High-Mobility Oxide Thin Film Transistor Process Optimization by AI(20min.)
*Yujiro Takeda1, Wei-Chun Ma1, Elliot Lu1, Dejiu Fan2, Jung Bae Kim2, Lynn Yang1, Ping han Hsieh1, Gejian Zhao1, You-Ron Lin1, Juergen Grillmayer1, Zero Hung2, Soo Young Choi2 (1. Applied Materials, Taiwan (Taiwan), 2. Applied Materials, Inc. (USA))
Keywords:
TFTs,AI,dynamic PVD system,high mobility,multilayer,Machine Learning
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