Presentation Information
[6]Improving the Uniformity of Electrical Characteristics in IGZO TFTs by Optimizing Boron Implantation Process
*Si Fu1, Wei Wang1, Xingyu Zhou1, Yanqing Guan1, Xiaoguang Zhu1, Chao Dai1, Juncheng Xiao1 (1. Wuhan China Star Optoelectronics.Semiconductor Display Technology Co., Ltd (China))
Keywords:
Uniformity,IGZO TFTs,Boron Implantation
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