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Reliability Improvement of IGZO TFTs through Hydrogen Control in SiNx Gate Insulators via N<sub>2</sub> and NO Plasma Treatments with Low Temperature Annealing

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The 33rd International Display Workshops (IDW '26)

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[9]Reliability Improvement of IGZO TFTs through Hydrogen Control in SiNx Gate Insulators via N₂ and NO Plasma Treatments with Low Temperature Annealing

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[9]Reliability Improvement of IGZO TFTs through Hydrogen Control in SiNx Gate Insulators via N2 and NO Plasma Treatments with Low Temperature Annealing

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[9]Reliability Improvement of IGZO TFTs through Hydrogen Control in SiNx Gate Insulators via N₂ and NO Plasma Treatments with Low Temperature Annealing