Presentation Information
[12]Multi-dimensional Analysis and Optimization of Dark Array Mura Caused by TFT-LCD Metal Etching Profile Abnormality
*Guanghui Cao1, Fada Shi1, Xin Liu1, Jiaming Xu1, Bing LI1, Hongyan Chang1, Shishuai Huang1, Bing Han1, Paul Shi1, Wade Chen1 (1. ChuZhou HKC Optoelectronics Technology Co., Ltd (China))
Keywords:
Dark array mura,CD bias,Metal etching,Pencil-tip
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