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A TCAD-Based Comparative Study of SiO2/SiNx Stacked Gate Dielectric for Enhanced Performance and Reliability in LTPS-TFTs

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The 33rd International Display Workshops (IDW '26)

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[18]A TCAD-Based Comparative Study of SiO₂/SiN_x Stacked Gate Dielectric for Enhanced Performance and Reliability in LTPS-TFTs

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Presentation Information

[18]A TCAD-Based Comparative Study of SiO2/SiNx Stacked Gate Dielectric for Enhanced Performance and Reliability in LTPS-TFTs

Keywords:

Comment

[18]A TCAD-Based Comparative Study of SiO₂/SiN_x Stacked Gate Dielectric for Enhanced Performance and Reliability in LTPS-TFTs